A07 type semiconductor rotary joint
79The ML02R005F-A07 rotary joint is a high-precision dynamic sealing component specially developed for semiconductor manufacturing equipment. This model aims to...
View detailsSearch the whole station
When using a rotary joint, it is necessary to install, disassemble, and maintain it according to the correct method to ensure that the joint can operate normally and extend its service life. The scope of application of rotary joints varies and should be selected according to actual needs.
Before disassembling the rotary joint, cut off the power supply of the equipment to stop it from running. Remove the rotary joint from the equipment and place it on the workbench;

Remove the metal hose, transition joint, and transition flange connected to the rotary joint;
On the workbench, disassemble the rotary joint, remove the internal parts, and then perform maintenance.
When repairing the rotary joint, the graphite sealing ring is the most important sealing element inside the rotary joint. The convex spherical surface of the outer tube in contact with the graphite sealing ring forms a sealing surface, and the flat surface of the bottom cover in contact with the graphite sealing ring forms a sealing surface;
Check the sealing surfaces of the convex spherical surface of the outer tube seal and the bottom plane of the bottom cover of the rotary joint for defects such as grooves, rust, cracks, ruptures, and uneven wear. For surface scratches on the sealing surface, they can be ground with sandpaper (oil sand) or sandpaper. For irreparable defects, replacement repair should be carried out.
Observe the friction surface of the graphite sealing ring sealing surface of the rotary joint, check for defects such as eccentric wear, three-point contact, or discontinuous sealing surface disconnection. If the sealing ring is worn or has cracks, ruptures, or damages, it should be replaced in a timely manner;
If there are impurities in the circulating liquid medium, they should be cleaned up in a timely manner, and a filter screen should be added to the pipeline. The recommended filtration accuracy is not less than 50 microns.
The ML02R005F-A07 rotary joint is a high-precision dynamic sealing component specially developed for semiconductor manufacturing equipment. This model aims to...
View detailsMSE04R06 is a multi-path rotary joint designed specifically for precision processes in semiconductor manufacturing. This device aims to solve the...
View detailsBWLR090Q-0-AOG belongs to the BWLR series thermal oil rotary joint, which is a precision sealing device designed for the transmission...
View detailsR108F series rotary joint is a high-speed fluid transmission component designed specifically for rubber vulcanizing machines, rolling machines, and various...
View details