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Semiconductor CMP wafer polishing dedicated rotary head
1. Characteristics
1) Low leakage rate ensures that the equipment can adsorb workpieces for a long time;
2) Small size is beneficial for reducing the height of customer equipment;
3) Low starting torque, equipment starts smoothly;
4) Low heat generation, can be installed in enclosed spaces for a long time;
5) Modular design reduces customer procurement costs;
Long lifespan, using mechanical seals.
2. Technical indicators
| medium | vacuum | nitrogen | CDA |
| Pressure (Kpa) | -95 | 150 | 150 |
| Rated speed (rpm) | 250 | 250 | 250 |
| leakage rate | All channels are available 150KPa@250rpm Leakage rate ≤ 0.35KPa/min | ||
| number of channels | 1-12 | ||
| Fluid diameter (mm) | 3.2 | ||
A rotary joint is a sealing device that connects stationary pipelines and rotating equipment, achieving leak free fluid transmission under 360 ° rotation. It allows fluid media to flow smoothly between fixed pipelines and rotating machines, and is a key component in industrial equipment
F90 swivel unions Transporting equipment components from a fixed pipeline system to high-speed rotating or reciprocating motion
Q32 swivel unions
JD40 rotary joint is a key sealing component in industrial fluid transmission systems, usually referring to a rotary connection device with a diameter of DN40 (or corresponding British caliber). As a transitional sealing device that transports fluid media (such as water, steam, hydraulic oil, thermal oil, compressed air, etc.) from static pipelines to dynamic rotating or swinging equipment
